SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Provided is a semiconductor device comprising: a semiconductor substrate having an upper surface and a lower surface and including a bulk donor; and a hydrogen increasing section wherein the hydride concentration increases monotonally from the upper surface towards the lower surface. The hydrogen in...
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Main Author | |
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Format | Patent |
Language | English French Japanese |
Published |
24.06.2021
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Subjects | |
Online Access | Get full text |
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