LOW EMISSION IMPLANTATION MASK AND SUBSTRATE ASSEMBLY
A substrate assembly may include a substrate base; and a low emission implantation mask, disposed on the substrate base. The low emission implantation mask may include a carbon-containing material, the carbon-containing material comprising an isotopically purified carbon, formed from a 12C carbon is...
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| Main Authors | , |
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| Format | Patent |
| Language | English French |
| Published |
04.02.2021
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| Subjects | |
| Online Access | Get full text |
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| Abstract | A substrate assembly may include a substrate base; and a low emission implantation mask, disposed on the substrate base. The low emission implantation mask may include a carbon-containing material, the carbon-containing material comprising an isotopically purified carbon, formed from a 12C carbon isotope precursor.
Un ensemble substrat peut comprendre une base de substrat ; et un masque d'implantation à faible émission, disposé sur la base de substrat. Le masque d'implantation à faible émission peut comprendre un matériau contenant du carbone, le matériau contenant du carbone comprenant un carbone isotopiquement purifié, formé à partir d'un précurseur d'isotopes de carbone 12C. |
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| AbstractList | A substrate assembly may include a substrate base; and a low emission implantation mask, disposed on the substrate base. The low emission implantation mask may include a carbon-containing material, the carbon-containing material comprising an isotopically purified carbon, formed from a 12C carbon isotope precursor.
Un ensemble substrat peut comprendre une base de substrat ; et un masque d'implantation à faible émission, disposé sur la base de substrat. Le masque d'implantation à faible émission peut comprendre un matériau contenant du carbone, le matériau contenant du carbone comprenant un carbone isotopiquement purifié, formé à partir d'un précurseur d'isotopes de carbone 12C. |
| Author | BLAKE, Julian G SINCLAIR, Frank |
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| DocumentTitleAlternate | MASQUE D'IMPLANTATION À FAIBLE ÉMISSION ET ENSEMBLE SUBSTRAT |
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| Notes | Application Number: WO2020US39168 |
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| Snippet | A substrate assembly may include a substrate base; and a low emission implantation mask, disposed on the substrate base. The low emission implantation mask may... |
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| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| Title | LOW EMISSION IMPLANTATION MASK AND SUBSTRATE ASSEMBLY |
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