LOW EMISSION IMPLANTATION MASK AND SUBSTRATE ASSEMBLY

A substrate assembly may include a substrate base; and a low emission implantation mask, disposed on the substrate base. The low emission implantation mask may include a carbon-containing material, the carbon-containing material comprising an isotopically purified carbon, formed from a 12C carbon is...

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Bibliographic Details
Main Authors SINCLAIR, Frank, BLAKE, Julian G
Format Patent
LanguageEnglish
French
Published 04.02.2021
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A substrate assembly may include a substrate base; and a low emission implantation mask, disposed on the substrate base. The low emission implantation mask may include a carbon-containing material, the carbon-containing material comprising an isotopically purified carbon, formed from a 12C carbon isotope precursor. Un ensemble substrat peut comprendre une base de substrat ; et un masque d'implantation à faible émission, disposé sur la base de substrat. Le masque d'implantation à faible émission peut comprendre un matériau contenant du carbone, le matériau contenant du carbone comprenant un carbone isotopiquement purifié, formé à partir d'un précurseur d'isotopes de carbone 12C.
Bibliography:Application Number: WO2020US39168