METHOD AND APPARATUS FOR TREATING DISCHARGE GAS CONTAINING TARGET GAS IN PLASMA STATE

• Main Authors: PAEK, Kwang Hyun, JU, Wontae, JANG, Yun Sang
• Format: Patent
• Language: English; French; Korean
• Published: 16.01.2020
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SEPARATION; TRANSPORTING

The present invention relates to a method and apparatus for treating a discharge gas containing a target gas in a plasma state. In treating a discharge gas containing a target gas that is difficult to convert, the conventional method causes difficulties in terms of either requiring a high conversion...