THREE-DIMENSIONAL MEASUREMENT DEVICE, SENSOR DEVICE FOR THREE-DIMENSIONAL MEASUREMENT, AND METHOD FOR PERFORMING CONTROL IN THREE-DIMENSIONAL MEASUREMENT DEVICE

• Main Authors: NAKATSUKA, Hitoshi, OKUNO, Motoharu
• Format: Patent
• Language: English; French; Japanese
• Published: 19.12.2019
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

This three-dimensional measurement device comprises: a light source and a lens for guiding light from the light source to a subject, a photomask that is disposed on the optical axis between the light source and lens and has a predetermined pattern formed thereon, a drive device for changing the posi...