CONVEYING DEVICE FOR CONVEYING AT LEAST ONE WAFER

• Main Authors: RAATZ, Heike, VERHELST, Bas
• Format: Patent
• Language: English; French; German
• Published: 19.12.2019
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; BEARINGS; BLASTING; CINEMATOGRAPHY; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DYNAMO-ELECTRIC MACHINES; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; ELEMENTS OR CRANKSHAFT MECHANISMS; ENGINEERING ELEMENTS AND UNITS; FLEXIBLE SHAFTS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; GENERATION; HEATING; HOLOGRAPHY; LIGHTING; MATERIALS THEREFOR; MECHANICAL ENGINEERING; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; SEMICONDUCTOR DEVICES; SHAFTS; THERMAL INSULATION IN GENERAL; WEAPONS

Die Erfindung betrifft eine Beförderungsvorrichtung (10) zum Befördern mindestens eines Wafers (36), mit zumindest einem Transportkörper (200), wobei der Transportkörper (200) zumindest zum Tragen oder zum Halten eines Wafers (36) eingerichtet ist und wobei die Beförderungsvorrichtung (10) dazu eingerichtet ist, den zumindest einen Transportkörper (200) zumindest zweidimensional auf einer Beförderungsfläche (35) zu bewegen. The invention relates to a conveying device (10) for conveying at least one wafer (36), comprising at least one transport body (200), wherein the transport body (200) is designed at least for supporting or holding a wafer (36), and wherein the conveying device (10) is designed to move the at least one transport body (200) at least two-dimensionally on a conveying surface (35). L'invention concerne un dispositif de transport (10) pour le transport d'au moins une plaquette (36), comprenant au moins un organe de transport (200), l'organe de transport (200) étant configuré au moins pour porter ou tenir une plaquette (36) et le dispositif de transport (10) étant configuré pour déplacer l'au moins un organe de transport (200) au moins dans deux dimensions sur une surface de transport (35).