COMPOSITE SINTERED BODY, SEMICONDUCTOR MANUFACTURING DEVICE MEMBER, AND METHOD FOR MANUFACTURING COMPOSITE SINTERED BODY
This composite sintered body comprises Al2O3 and MgAl2O4. The Al2O3 content in the composite sintered body is at least 95.5 wt%. The average sintered particle size of the Al2O3 in the composite sintered body is 2 μm to 4 μm, inclusive. The standard deviation of the sintered particle size distributio...
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Main Authors | , , , |
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Format | Patent |
Language | English French Japanese |
Published |
03.10.2019
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Subjects | |
Online Access | Get full text |
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