COMPOSITE SINTERED BODY, SEMICONDUCTOR MANUFACTURING DEVICE MEMBER, AND METHOD FOR MANUFACTURING COMPOSITE SINTERED BODY

• Main Authors: ATSUJI, Kyohei, KATSUDA, Yuji, NISHIMURA, Noboru, NAGAI, Asumi
• Format: Patent
• Language: English; French; Japanese
• Published: 03.10.2019
• Subjects: ARTIFICIAL STONE; BASIC ELECTRIC ELEMENTS; CEMENTS; CERAMICS; CHEMISTRY; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS; CONCRETE; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; LIME, MAGNESIA; METALLURGY; REFRACTORIES; SEMICONDUCTOR DEVICES; SLAG; TREATMENT OF NATURAL STONE

This composite sintered body comprises Al2O3 and MgAl2O4. The Al2O3 content in the composite sintered body is at least 95.5 wt%. The average sintered particle size of the Al2O3 in the composite sintered body is 2 μm to 4 μm, inclusive. The standard deviation of the sintered particle size distributio...