METHODS AND SYSTEMS FOR CONTROLLING PLASMA GLOW DISCHARGE IN A PLASMA CHAMBER

Methods and systems for controlling glow discharge in a plasma chamber are disclosed. An example apparatus includes a chamber having chamber walls connected to ground and a radio frequency (RF) power supply. A top electrode is connected to the RF power supply and a bottom electrode connected to the...

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Bibliographic Details
Main Authors BINGHAM, Aaron, VAN CLEEMPUT, Patrick
Format Patent
LanguageEnglish
French
Published 25.04.2019
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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