NANOELECTRODE DEVICES AND METHODS OF FABRICATION THEREOF

• Main Authors: NORDMAN, Eric S, DIMITROV, Valentin V, KAWASAKI, Hisao, MIHARA, Kazusuke, HONKURA, Toshihiko, OLDHAM, Mark F
• Format: Patent
• Language: English; French
• Published: 04.04.2019
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The present disclosure provides devices and methods for fabrication of nanoelectrode pairs which may be useful for use with tunneling labels. Devices fabricated as described may have good spacing tolerances, angular tolerances, surface uniformity, and may have reduced particulate contamination. La p...