NANOELECTRODE DEVICES AND METHODS OF FABRICATION THEREOF

The present disclosure provides devices and methods for fabrication of nanoelectrode pairs which may be useful for use with tunneling labels. Devices fabricated as described may have good spacing tolerances, angular tolerances, surface uniformity, and may have reduced particulate contamination. La p...

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Bibliographic Details
Main Authors NORDMAN, Eric S, DIMITROV, Valentin V, KAWASAKI, Hisao, MIHARA, Kazusuke, HONKURA, Toshihiko, OLDHAM, Mark F
Format Patent
LanguageEnglish
French
Published 04.04.2019
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:The present disclosure provides devices and methods for fabrication of nanoelectrode pairs which may be useful for use with tunneling labels. Devices fabricated as described may have good spacing tolerances, angular tolerances, surface uniformity, and may have reduced particulate contamination. La présente invention concerne des dispositifs et des procédés de fabrication de paires de nanoélectrodes qui peuvent être utiles pour une utilisation avec des étiquettes de détection de tunnel. Les dispositifs fabriqués selon l'invention peuvent avoir de bonnes tolérances d'espacement, tolérances angulaires, une bonne uniformité de surface, et peuvent avoir une contamination particulaire réduite.
Bibliography:Application Number: WO2018JP36086