GAS SUPPLY SYSTEM
This gas supply system (1) is provided with: an automatic valve (18) which is provided in a flow passage (6) and which automatically opens and closes to regulate the flow rate of process gas to be supplied to a chamber (4); and a manual valve (20) provided in the flow passage (6) at a position downs...
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Main Authors | , , , , , |
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Format | Patent |
Language | English French Japanese |
Published |
07.02.2019
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Subjects | |
Online Access | Get full text |
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