GAS SUPPLY SYSTEM
This gas supply system (1) is provided with: an automatic valve (18) which is provided in a flow passage (6) and which automatically opens and closes to regulate the flow rate of process gas to be supplied to a chamber (4); and a manual valve (20) provided in the flow passage (6) at a position downs...
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Format | Patent |
Language | English French Japanese |
Published |
07.02.2019
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Abstract | This gas supply system (1) is provided with: an automatic valve (18) which is provided in a flow passage (6) and which automatically opens and closes to regulate the flow rate of process gas to be supplied to a chamber (4); and a manual valve (20) provided in the flow passage (6) at a position downstream of the automatic valve (18) and closest to the chamber (4), and opened and closed manually to adjust the flow rate of the process gas. The manual valve (20) is a direct diaphragm valve having a diaphragm (24) which is seated on and separated from a seat (44) in coordination with a stem (32) and a disk (28) as the manual valve (20) is opened and closed. The manual valve (20) has a stroke regulation mechanism (36) for regulating the valve stroke.
L'invention concerne un système d'alimentation en gaz (1) comprenant : une soupape automatique (18) qui est disposée dans un passage d'écoulement (6) et qui s'ouvre et se ferme automatiquement pour réguler le débit du gaz de traitement devant être fourni à une chambre (4) ; et une soupape manuelle (20) disposée dans le passage d'écoulement (6) à une position en aval de la soupape automatique (18) et à une position la plus proche de la chambre (4), la soupape manuelle étant ouverte et fermée manuellement pour ajuster le débit du gaz de traitement. La soupape manuelle (20) est une soupape à membrane directe ayant une membrane (24) placée sur un siège (44) et séparée du siège (44) en coordination avec une tige (32) et un disque (28) lorsque la soupape manuelle (20) est ouverte et fermée. La soupape manuelle (20) possède un mécanisme de régulation de course (36) permettant de réguler la course de la soupape.
ガス供給システム(1)は、流路(6)に設けられて自動開閉によりチャンバ(4)に供給するプロセスガスの流量を調整する自動弁(18)と、流路(6)における自動弁(18)の下流であってチャンバ(4)の直近に設けられ、手動開閉によりプロセスガスの流量を調整する手動弁(20)とを備え、手動弁(20)は、開閉に伴いステム(32)及びディスク(28)と連動し、シート(44)に着座及び離座するダイヤフラム(24)を有するダイレクトダイヤフラム弁であって、バルブストロークを調整するストローク調整機構(36)を有する。 |
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AbstractList | This gas supply system (1) is provided with: an automatic valve (18) which is provided in a flow passage (6) and which automatically opens and closes to regulate the flow rate of process gas to be supplied to a chamber (4); and a manual valve (20) provided in the flow passage (6) at a position downstream of the automatic valve (18) and closest to the chamber (4), and opened and closed manually to adjust the flow rate of the process gas. The manual valve (20) is a direct diaphragm valve having a diaphragm (24) which is seated on and separated from a seat (44) in coordination with a stem (32) and a disk (28) as the manual valve (20) is opened and closed. The manual valve (20) has a stroke regulation mechanism (36) for regulating the valve stroke.
L'invention concerne un système d'alimentation en gaz (1) comprenant : une soupape automatique (18) qui est disposée dans un passage d'écoulement (6) et qui s'ouvre et se ferme automatiquement pour réguler le débit du gaz de traitement devant être fourni à une chambre (4) ; et une soupape manuelle (20) disposée dans le passage d'écoulement (6) à une position en aval de la soupape automatique (18) et à une position la plus proche de la chambre (4), la soupape manuelle étant ouverte et fermée manuellement pour ajuster le débit du gaz de traitement. La soupape manuelle (20) est une soupape à membrane directe ayant une membrane (24) placée sur un siège (44) et séparée du siège (44) en coordination avec une tige (32) et un disque (28) lorsque la soupape manuelle (20) est ouverte et fermée. La soupape manuelle (20) possède un mécanisme de régulation de course (36) permettant de réguler la course de la soupape.
ガス供給システム(1)は、流路(6)に設けられて自動開閉によりチャンバ(4)に供給するプロセスガスの流量を調整する自動弁(18)と、流路(6)における自動弁(18)の下流であってチャンバ(4)の直近に設けられ、手動開閉によりプロセスガスの流量を調整する手動弁(20)とを備え、手動弁(20)は、開閉に伴いステム(32)及びディスク(28)と連動し、シート(44)に着座及び離座するダイヤフラム(24)を有するダイレクトダイヤフラム弁であって、バルブストロークを調整するストローク調整機構(36)を有する。 |
Author | MIURA Takeru INADA Toshiyuki KONDO Kenta SATO Hidenobu NAKATA Tomohiro WATANABE Kazunari |
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DocumentTitleAlternate | SYSTÈME D'ALIMENTATION EN GAZ ガス供給システム |
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Snippet | This gas supply system (1) is provided with: an automatic valve (18) which is provided in a flow passage (6) and which automatically opens and closes to... |
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SubjectTerms | ACTUATING-FLOATS BASIC ELECTRIC ELEMENTS BLASTING COCKS DEVICES FOR VENTING OR AERATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING SEMICONDUCTOR DEVICES TAPS THERMAL INSULATION IN GENERAL VALVES WEAPONS |
Title | GAS SUPPLY SYSTEM |
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