METAL ION SOURCE

The objective of the present invention is to address the problem that a small-sized ion source does not allow dense ions to be generated efficiently when an electron beam irradiation method is used on a vaporization source for vaporizing a solid, and to provide a metal ion source that generates dens...

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Bibliographic Details
Main Author NUNOGAKI Masanobu
Format Patent
LanguageEnglish
French
Japanese
Published 26.07.2018
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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