CLEANING SOLUTION MIXING SYSTEM WITH ULTRA-DILUTE CLEANING SOLUTION AND METHOD OF OPERATION THEREOF

• Main Author: RASTEGAR, Abbas
• Format: Patent
• Language: English; French
• Published: 01.02.2018
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; PHYSICS; TRANSPORTING

Disclosed are a cleaning solution mixing system, a tool and a method of operation thereof, including an ultrapure water source for providing ultrapure water; an ammonia filter for filtering ammonia in gas form; a hydrogen peroxide filter for filtering hydrogen peroxide in gas form; an ammonia re-gas membrane for dissolving the ammonia in the ultrapure water and forming ultra-dilute ammoniated water; a hydrogen peroxide re-gas membrane for dissolving the hydrogen peroxide in the ultrapure water and forming ultra-dilute hydrogenated water; and a mixer for forming an ultra-dilute cleaning solution by mixing the ultra-dilute ammoniated water and the ultra-dilute hydrogenated water. L'invention concerne un système de mélange de solution de nettoyage, un outil et un procédé de fonctionnement de celui-ci, comprenant une source d'eau ultrapure pour fournir de l'eau ultrapure ; un filtre à ammoniac pour filtrer l'ammoniac sous forme gazeuse ; un filtre à peroxyde d'hydrogène pour filtrer le peroxyde d'hydrogène sous forme gazeuse ; une membrane de regazéification d'ammoniac pour dissoudre l'ammoniac dans l'eau ultrapure et former de l'eau ammoniacale ultradiluée ; une membrane de regazéification du peroxyde d'hydrogène pour dissoudre le peroxyde d'hydrogène dans l'eau ultrapure et former de l'eau hydrogénée ultradiluée ; et un mélangeur pour former une solution de nettoyage ultradiluée en mélangeant l'eau ammoniacale ultradiluée et l'eau hydrogénée ultradiluée.