TECHNIQUE FOR MEASURING OVERLAY BETWEEN LAYERS OF A MULTILAYER STRUCTURE
A method for determining overlay between layers of a multilayer structure may include obtaining a given image representing the multilayer structure, obtaining expected images for layers of the multilayer structure, providing a combined expected image of the multilayer structure as a combination of t...
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Main Authors | , , , , , , , , |
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Format | Patent |
Language | English French |
Published |
19.01.2017
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Subjects | |
Online Access | Get full text |
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