TECHNIQUE FOR MEASURING OVERLAY BETWEEN LAYERS OF A MULTILAYER STRUCTURE
A method for determining overlay between layers of a multilayer structure may include obtaining a given image representing the multilayer structure, obtaining expected images for layers of the multilayer structure, providing a combined expected image of the multilayer structure as a combination of t...
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Format | Patent |
Language | English French |
Published |
19.01.2017
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Abstract | A method for determining overlay between layers of a multilayer structure may include obtaining a given image representing the multilayer structure, obtaining expected images for layers of the multilayer structure, providing a combined expected image of the multilayer structure as a combination of the expected images of said layers, performing registration of the given image against the combined expected image, and providing segmentation of the given image, thereby producing a segmented image, and maps of the layers of said multilayered structure. The method may further include determining overlay between any two selected layers of the multilayer structure by processing the maps of the two selected layers together with the expected images of said two selected layers.
La présente invention a trait à un procédé qui permet de déterminer une superposition entre des couches d'une structure multicouche, et qui peut consister à obtenir une image donnée représentant la structure multicouche, à obtenir des images prévues pour des couches de la structure multicouche, à fournir une image prévue combinée de la structure multicouche sous la forme d'une combinaison des images prévues desdites couches, à réaliser un enregistrement de l'image donnée par rapport à l'image prévue combinée, et à assurer la segmentation de l'image donnée, ce qui permet de produire une image segmentée ainsi que des cartes des couches de ladite structure multicouche. Le procédé peut consister en outre à déterminer une superposition entre deux couches sélectionnées de la structure multicouche grâce au traitement simultané des cartes des deux couches sélectionnées et des images prévues de ces deux couches sélectionnées. |
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AbstractList | A method for determining overlay between layers of a multilayer structure may include obtaining a given image representing the multilayer structure, obtaining expected images for layers of the multilayer structure, providing a combined expected image of the multilayer structure as a combination of the expected images of said layers, performing registration of the given image against the combined expected image, and providing segmentation of the given image, thereby producing a segmented image, and maps of the layers of said multilayered structure. The method may further include determining overlay between any two selected layers of the multilayer structure by processing the maps of the two selected layers together with the expected images of said two selected layers.
La présente invention a trait à un procédé qui permet de déterminer une superposition entre des couches d'une structure multicouche, et qui peut consister à obtenir une image donnée représentant la structure multicouche, à obtenir des images prévues pour des couches de la structure multicouche, à fournir une image prévue combinée de la structure multicouche sous la forme d'une combinaison des images prévues desdites couches, à réaliser un enregistrement de l'image donnée par rapport à l'image prévue combinée, et à assurer la segmentation de l'image donnée, ce qui permet de produire une image segmentée ainsi que des cartes des couches de ladite structure multicouche. Le procédé peut consister en outre à déterminer une superposition entre deux couches sélectionnées de la structure multicouche grâce au traitement simultané des cartes des deux couches sélectionnées et des images prévues de ces deux couches sélectionnées. |
Author | SCHWARZBAND, Ishai LEVI, Shimon ZAUER, Itay RATHORE, Dhananjay Singh KRIS, Roman GOLDMAN, Ran NOVAK, Olga ADAN, Ofer WEINBERG, Yakov |
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DocumentTitleAlternate | TECHNIQUE PERMETTANT DE MESURER UNE SUPERPOSITION ENTRE DES COUCHES D'UNE STRUCTURE MULTICOUCHE |
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RelatedCompanies | APPLIED MATERIALS ISRAEL LTD RATHORE, Dhananjay Singh |
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Snippet | A method for determining overlay between layers of a multilayer structure may include obtaining a given image representing the multilayer structure, obtaining... |
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Title | TECHNIQUE FOR MEASURING OVERLAY BETWEEN LAYERS OF A MULTILAYER STRUCTURE |
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