LASER IRRADIATION DEVICE AND METHOD
A laser irradiation device and method are disclosed. Particularly, provided are a laser irradiation device and method according to an embodiment of the present invention, the device comprising: a beam generation unit for generating a laser beam; a scan mirror unit for adjusting the direction of the...
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Main Authors | , , , , |
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Format | Patent |
Language | English French Korean |
Published |
19.05.2016
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Subjects | |
Online Access | Get full text |
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