LASER IRRADIATION DEVICE AND METHOD
A laser irradiation device and method are disclosed. Particularly, provided are a laser irradiation device and method according to an embodiment of the present invention, the device comprising: a beam generation unit for generating a laser beam; a scan mirror unit for adjusting the direction of the...
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| Main Authors | , , , , |
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| Format | Patent |
| Language | English French Korean |
| Published |
19.05.2016
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| Abstract | A laser irradiation device and method are disclosed. Particularly, provided are a laser irradiation device and method according to an embodiment of the present invention, the device comprising: a beam generation unit for generating a laser beam; a scan mirror unit for adjusting the direction of the laser beam transmitted from the beam generation unit; and a rotating mirror for reflecting the laser beam of which the direction is adjusted by the scan mirror unit, wherein the rotating mirror is provided to be rotatable such that the direction-adjusted laser beam irradiates an object to be processed while forming a linear laser beam.
L'invention concerne un dispositif et un procédé d'exposition laser. En particulier, selon un mode de réalisation, la présente invention concerne un dispositif et un procédé d'exposition laser, le dispositif comprenant : une unité de génération de faisceau pour générer un faisceau laser ; une unité de miroir de balayage pour ajuster la direction du faisceau laser émis par l'unité de génération de faisceau ; et un miroir rotatif pour réfléchir le faisceau laser dont la direction est réglée par l'unité de miroir de balayage, le miroir rotatif étant disposé pour pouvoir tourner de manière que l'objet devant être traité soit exposé à un faisceau laser à direction réglée un tout en formant un faisceau laser linéaire.
본 발명은 레이저 조사 장치 및 방법을 개시한다. 구체적으로, 본 발명의 실시예에 따른 레이저 조사 장치 및 방법은, 레이저 빔을 생성하는 빔 생성부; 상기 빔 생성부로부터 전달된 상기 레이저 빔의 방향을 조절하는 스캔 미러부; 및 상기 스캔 미러부를 통해 방향이 조절된 상기 레이저 빔을 반사시키는 회전 미러;를 포함하고, 상기 회전 미러는, 상기 방향이 조절된 상기 레이저 빔이 가공 대상물 상에 선형 레이저 광을 형성하며 조사되도록 회전 가능 하도록 마련되는 것을 포함한다. |
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| AbstractList | A laser irradiation device and method are disclosed. Particularly, provided are a laser irradiation device and method according to an embodiment of the present invention, the device comprising: a beam generation unit for generating a laser beam; a scan mirror unit for adjusting the direction of the laser beam transmitted from the beam generation unit; and a rotating mirror for reflecting the laser beam of which the direction is adjusted by the scan mirror unit, wherein the rotating mirror is provided to be rotatable such that the direction-adjusted laser beam irradiates an object to be processed while forming a linear laser beam.
L'invention concerne un dispositif et un procédé d'exposition laser. En particulier, selon un mode de réalisation, la présente invention concerne un dispositif et un procédé d'exposition laser, le dispositif comprenant : une unité de génération de faisceau pour générer un faisceau laser ; une unité de miroir de balayage pour ajuster la direction du faisceau laser émis par l'unité de génération de faisceau ; et un miroir rotatif pour réfléchir le faisceau laser dont la direction est réglée par l'unité de miroir de balayage, le miroir rotatif étant disposé pour pouvoir tourner de manière que l'objet devant être traité soit exposé à un faisceau laser à direction réglée un tout en formant un faisceau laser linéaire.
본 발명은 레이저 조사 장치 및 방법을 개시한다. 구체적으로, 본 발명의 실시예에 따른 레이저 조사 장치 및 방법은, 레이저 빔을 생성하는 빔 생성부; 상기 빔 생성부로부터 전달된 상기 레이저 빔의 방향을 조절하는 스캔 미러부; 및 상기 스캔 미러부를 통해 방향이 조절된 상기 레이저 빔을 반사시키는 회전 미러;를 포함하고, 상기 회전 미러는, 상기 방향이 조절된 상기 레이저 빔이 가공 대상물 상에 선형 레이저 광을 형성하며 조사되도록 회전 가능 하도록 마련되는 것을 포함한다. |
| Author | TAI, LONE-WEN CHOI, BYOUNGAN KANG, KI-SEOK KIM, JONG-SIK SHON, JE-HA |
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| Snippet | A laser irradiation device and method are disclosed. Particularly, provided are a laser irradiation device and method according to an embodiment of the present... |
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| Title | LASER IRRADIATION DEVICE AND METHOD |
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