EMS DEVICE HAVING A NON-ELECTRICALLY ACTIVE ABSORBER

This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having a non-electrically active absorber. In one aspect, the EMS device includes a stationary electrode over a substrate, a dielectric layer over the stationary electrode, an absorber over the diel...

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Main Authors HONG, BRANDON JOHN, PAN, YAOLING, LAVERY, KRISTOPHER ANDREW, HONG, JOHN HYUNCHUL, CHANG, TALLIS YOUNG, CHAN, EDWARD KEAT LEEM, WEN, BING, MA, JIAN JIM, KIM, CHEONHONG
Format Patent
LanguageEnglish
French
Published 05.11.2015
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Abstract This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having a non-electrically active absorber. In one aspect, the EMS device includes a stationary electrode over a substrate, a dielectric layer over the stationary electrode, an absorber over the dielectric layer, and a movable electrode over the absorber. The movable electrode is configured to move to a plurality of positions between the absorber and the movable electrode to define a plurality of gap heights. Furthermore, the absorber includes a non-electrically active material. In some implementations, the absorber can include an optical layer having a plurality of particles in an electrically insulating material. La présente invention concerne un appareil, des systèmes et des procédés destinés à un dispositif de systèmes électromécaniques (EMS) ayant un absorbeur non électriquement actif. Selon un aspect de l'invention, le dispositif EMS comprend une électrode fixe sur un substrat, une couche diélectrique sur l'électrode fixe, un absorbeur sur la couche diélectrique, et une électrode mobile sur l'absorbeur. L'électrode mobile est conçue de façon à se déplacer vers une pluralité de positions entre l'absorbeur et l'électrode mobile pour définir une pluralité de hauteurs d'espace. En outre, l'absorbeur comprend un matériau non électriquement actif. Selon certains modes de réalisation, l'absorbeur peut comprendre une couche optique ayant une pluralité de particules dans un matériau électriquement isolant.
AbstractList This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having a non-electrically active absorber. In one aspect, the EMS device includes a stationary electrode over a substrate, a dielectric layer over the stationary electrode, an absorber over the dielectric layer, and a movable electrode over the absorber. The movable electrode is configured to move to a plurality of positions between the absorber and the movable electrode to define a plurality of gap heights. Furthermore, the absorber includes a non-electrically active material. In some implementations, the absorber can include an optical layer having a plurality of particles in an electrically insulating material. La présente invention concerne un appareil, des systèmes et des procédés destinés à un dispositif de systèmes électromécaniques (EMS) ayant un absorbeur non électriquement actif. Selon un aspect de l'invention, le dispositif EMS comprend une électrode fixe sur un substrat, une couche diélectrique sur l'électrode fixe, un absorbeur sur la couche diélectrique, et une électrode mobile sur l'absorbeur. L'électrode mobile est conçue de façon à se déplacer vers une pluralité de positions entre l'absorbeur et l'électrode mobile pour définir une pluralité de hauteurs d'espace. En outre, l'absorbeur comprend un matériau non électriquement actif. Selon certains modes de réalisation, l'absorbeur peut comprendre une couche optique ayant une pluralité de particules dans un matériau électriquement isolant.
Author HONG, BRANDON JOHN
MA, JIAN JIM
CHAN, EDWARD KEAT LEEM
LAVERY, KRISTOPHER ANDREW
WEN, BING
KIM, CHEONHONG
HONG, JOHN HYUNCHUL
PAN, YAOLING
CHANG, TALLIS YOUNG
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– fullname: CHAN, EDWARD KEAT LEEM
– fullname: WEN, BING
– fullname: MA, JIAN JIM
– fullname: KIM, CHEONHONG
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DocumentTitleAlternate DISPOSITIF DE SYSTÈMES ÉLECTROMÉCANIQUES AYANT UN ABSORBEUR NON ÉLECTRIQUEMENT ACTIF
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Snippet This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having a non-electrically active absorber. In one aspect,...
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SubjectTerms ADVERTISING
ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICESUSING STATIC MEANS TO PRESENT VARIABLE INFORMATION
CALCULATING
COMPUTING
COUNTING
CRYPTOGRAPHY
DISPLAY
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IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
SEALS
Title EMS DEVICE HAVING A NON-ELECTRICALLY ACTIVE ABSORBER
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