EMS DEVICE HAVING A NON-ELECTRICALLY ACTIVE ABSORBER
This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having a non-electrically active absorber. In one aspect, the EMS device includes a stationary electrode over a substrate, a dielectric layer over the stationary electrode, an absorber over the diel...
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Format | Patent |
Language | English French |
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05.11.2015
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Abstract | This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having a non-electrically active absorber. In one aspect, the EMS device includes a stationary electrode over a substrate, a dielectric layer over the stationary electrode, an absorber over the dielectric layer, and a movable electrode over the absorber. The movable electrode is configured to move to a plurality of positions between the absorber and the movable electrode to define a plurality of gap heights. Furthermore, the absorber includes a non-electrically active material. In some implementations, the absorber can include an optical layer having a plurality of particles in an electrically insulating material.
La présente invention concerne un appareil, des systèmes et des procédés destinés à un dispositif de systèmes électromécaniques (EMS) ayant un absorbeur non électriquement actif. Selon un aspect de l'invention, le dispositif EMS comprend une électrode fixe sur un substrat, une couche diélectrique sur l'électrode fixe, un absorbeur sur la couche diélectrique, et une électrode mobile sur l'absorbeur. L'électrode mobile est conçue de façon à se déplacer vers une pluralité de positions entre l'absorbeur et l'électrode mobile pour définir une pluralité de hauteurs d'espace. En outre, l'absorbeur comprend un matériau non électriquement actif. Selon certains modes de réalisation, l'absorbeur peut comprendre une couche optique ayant une pluralité de particules dans un matériau électriquement isolant. |
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AbstractList | This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having a non-electrically active absorber. In one aspect, the EMS device includes a stationary electrode over a substrate, a dielectric layer over the stationary electrode, an absorber over the dielectric layer, and a movable electrode over the absorber. The movable electrode is configured to move to a plurality of positions between the absorber and the movable electrode to define a plurality of gap heights. Furthermore, the absorber includes a non-electrically active material. In some implementations, the absorber can include an optical layer having a plurality of particles in an electrically insulating material.
La présente invention concerne un appareil, des systèmes et des procédés destinés à un dispositif de systèmes électromécaniques (EMS) ayant un absorbeur non électriquement actif. Selon un aspect de l'invention, le dispositif EMS comprend une électrode fixe sur un substrat, une couche diélectrique sur l'électrode fixe, un absorbeur sur la couche diélectrique, et une électrode mobile sur l'absorbeur. L'électrode mobile est conçue de façon à se déplacer vers une pluralité de positions entre l'absorbeur et l'électrode mobile pour définir une pluralité de hauteurs d'espace. En outre, l'absorbeur comprend un matériau non électriquement actif. Selon certains modes de réalisation, l'absorbeur peut comprendre une couche optique ayant une pluralité de particules dans un matériau électriquement isolant. |
Author | HONG, BRANDON JOHN MA, JIAN JIM CHAN, EDWARD KEAT LEEM LAVERY, KRISTOPHER ANDREW WEN, BING KIM, CHEONHONG HONG, JOHN HYUNCHUL PAN, YAOLING CHANG, TALLIS YOUNG |
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DocumentTitleAlternate | DISPOSITIF DE SYSTÈMES ÉLECTROMÉCANIQUES AYANT UN ABSORBEUR NON ÉLECTRIQUEMENT ACTIF |
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RelatedCompanies | QUALCOMM MEMS TECHNOLOGIES, INC |
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Snippet | This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having a non-electrically active absorber. In one aspect,... |
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Title | EMS DEVICE HAVING A NON-ELECTRICALLY ACTIVE ABSORBER |
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