FIELD EFFECT TRANSISTOR

Disclosed is a field effect transistor which comprises a nitride semiconductor laminate (102) that is formed on top of a substrate (101), a source electrode (105), a drain electrode (106), a gate electrode (107), an insulating film (110) that is formed on top of the nitride semiconductor laminate (1...

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Main Authors NAKAZAWA, SATOSHI, TSURUMI, NAOHIRO, UEDA, TETSUZO, ANDA, YOSHIHARU, KAJITANI, RYO
Format Patent
LanguageEnglish
French
Japanese
Published 01.12.2011
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Abstract Disclosed is a field effect transistor which comprises a nitride semiconductor laminate (102) that is formed on top of a substrate (101), a source electrode (105), a drain electrode (106), a gate electrode (107), an insulating film (110) that is formed on top of the nitride semiconductor laminate (102), and a field plate (115) that is formed on top of and in contact with the insulating film (110) with an end portion being located between the gate electrode (107) and the drain electrode (106). The insulating film (110) comprises a first film (111) and a second film (112) that has a lower withstand voltage than the first film (111), and has a thin film portion (110a) that is formed between the gate electrode (107) and the drain electrode (106). The field plate (115) covers the thin film portion (110a) and is connected to the source electrode in an opening portion. L'invention concerne un transistor à effet de champ comportant un stratifié (102) de semiconducteur de type nitrure formé par-dessus un substrat (101), une électrode (105) de source, une électrode (106) de drain, une électrode (107) de grille, un film isolant (110) formé par-dessus le stratifié (102) de semiconducteur de type nitrure, et une plaque (115) de champ formée par-dessus et en contact avec le film isolant (110), et dont une partie d'extrémité est située entre l'électrode (107) de grille et l'électrode (106) de drain. Le film isolant (110) comporte un premier film (111) et un deuxième film (112) caractérisé par une tension de tenue inférieure à celle du premier film (111), et comprend une partie (110a) de film mince formée entre l'électrode (107) de grille et l'électrode (106) de drain. La plaque (115) de champ recouvre la partie (110a) de film mince et est reliée à l'électrode de source au sein d'une partie d'ouverture.
AbstractList Disclosed is a field effect transistor which comprises a nitride semiconductor laminate (102) that is formed on top of a substrate (101), a source electrode (105), a drain electrode (106), a gate electrode (107), an insulating film (110) that is formed on top of the nitride semiconductor laminate (102), and a field plate (115) that is formed on top of and in contact with the insulating film (110) with an end portion being located between the gate electrode (107) and the drain electrode (106). The insulating film (110) comprises a first film (111) and a second film (112) that has a lower withstand voltage than the first film (111), and has a thin film portion (110a) that is formed between the gate electrode (107) and the drain electrode (106). The field plate (115) covers the thin film portion (110a) and is connected to the source electrode in an opening portion. L'invention concerne un transistor à effet de champ comportant un stratifié (102) de semiconducteur de type nitrure formé par-dessus un substrat (101), une électrode (105) de source, une électrode (106) de drain, une électrode (107) de grille, un film isolant (110) formé par-dessus le stratifié (102) de semiconducteur de type nitrure, et une plaque (115) de champ formée par-dessus et en contact avec le film isolant (110), et dont une partie d'extrémité est située entre l'électrode (107) de grille et l'électrode (106) de drain. Le film isolant (110) comporte un premier film (111) et un deuxième film (112) caractérisé par une tension de tenue inférieure à celle du premier film (111), et comprend une partie (110a) de film mince formée entre l'électrode (107) de grille et l'électrode (106) de drain. La plaque (115) de champ recouvre la partie (110a) de film mince et est reliée à l'électrode de source au sein d'une partie d'ouverture.
Author ANDA, YOSHIHARU
NAKAZAWA, SATOSHI
UEDA, TETSUZO
KAJITANI, RYO
TSURUMI, NAOHIRO
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DocumentTitleAlternate TRANSISTOR À EFFET DE CHAMP
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RelatedCompanies ANDA, YOSHIHARU
NAKAZAWA, SATOSHI
UEDA, TETSUZO
KAJITANI, RYO
TSURUMI, NAOHIRO
PANASONIC CORPORATION
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Snippet Disclosed is a field effect transistor which comprises a nitride semiconductor laminate (102) that is formed on top of a substrate (101), a source electrode...
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SourceType Open Access Repository
SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Title FIELD EFFECT TRANSISTOR
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