METHOD AND APPARATUS FOR PRODUCING GRANULAR SILICON
Silicon granules are produced by chemical vapor deposition on seed particles inside a chamber within a fluidized bed reactor. The chamber contains an obstructing member, or bubble breaker, which is sized and shaped to restrict the growth of bubbles inside the chamber and which has interior passagewa...
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Main Authors | , |
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Format | Patent |
Language | English French |
Published |
15.07.2010
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Subjects | |
Online Access | Get full text |
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