METHOD AND APPARATUS FOR PRODUCING GRANULAR SILICON

Silicon granules are produced by chemical vapor deposition on seed particles inside a chamber within a fluidized bed reactor. The chamber contains an obstructing member, or bubble breaker, which is sized and shaped to restrict the growth of bubbles inside the chamber and which has interior passagewa...

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Bibliographic Details
Main Authors SPANGLER, MICHAEL, V, STUCKI, GLEN
Format Patent
LanguageEnglish
French
Published 15.07.2010
Subjects
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