METHOD OF FABRICATING A PROBE DEVICE FOR A METROLOGY INSTRUMENT AND PROBE DEVICE PRODUCED THEREBY

• Main Authors: NAGLE, STEVEN, WANG, WEIJIE
• Format: Patent
• Language: English; French
• Published: 09.07.2009
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; MEASURING; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; TESTING

A method of producing a probe device 50 for a metrology instrument such as an AFM includes providing a substrate and forming a stock extending upwardly from the substrate. The stock 60 is preferably FIB milled to form a tip 76 of the probe device. The tip preferably has a high aspect ratio, with a h...