A MICROFLUIDIC DOWNHOLE DENSITY AND VISCOSITY SENSOR
The present invention recited a method and apparatus for providing a parameter of a fluid within a fluid channel using a MEMS resonating element in contact with the fluid moving through the fluid channel. Additionally an actuating device associated with the MEMS resonating element is further provide...
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Main Authors | , , , , , , , , , , |
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Format | Patent |
Language | English French |
Published |
11.09.2009
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Subjects | |
Online Access | Get full text |
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