SEMICONDUCTOR DEVICE AND PROCESS FOR MANUFACTURING THE SAME

A process for manufacturing a semiconductor device, including the steps of forming a gate electrode material film on a semiconductor substrate; carrying out linear patterning of the gate electrode material film; forming a side wall along each long side of the linear gate electrode material film patt...

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Bibliographic Details
Main Author OKUNO, MASAKI
Format Patent
LanguageEnglish
French
Japanese
Published 25.09.2008
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A process for manufacturing a semiconductor device, including the steps of forming a gate electrode material film on a semiconductor substrate; carrying out linear patterning of the gate electrode material film; forming a side wall along each long side of the linear gate electrode material film pattern; and thereafter cutting the line at given locations to thereby divide the same into multiple gate electrodes. Procédé de fabrication d'un dispositif à semi-conducteurs, comprenant les étapes de formation d'un film de matériau d'électrode de grille sur un substrat semi-conducteur ; de réalisation du motif linéaire du film de matériau d'électrode de grille ; de formation d'une paroi latérale le long de chaque côté long du motif du film de matériau d'électrode de grille ; puis de découpage de la ligne à des emplacements donnés pour diviser ainsi celle-ci en de multiples électrodes de grilles.
Bibliography:Application Number: WO2007JP55351