PRODUCT DESIGNED TO BE USED WITH HANDLING SYSTEM

A product (Pr) can be used in the semiconductor, MEM, flat screen and/or solar cell industries, where the product is capable of being gripped by a handling system (Bm). The product can include: a plate (1) made of silicon, quartz, silicon carbide, silicon nitride, arsenic, and/or gallium arsenide, c...

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Bibliographic Details
Main Authors PROCESSE, JEAN MICHEL, GAUDON, ALAIN, HADDAD, FLORENT
Format Patent
LanguageEnglish
French
Published 02.05.2008
Subjects
Online AccessGet full text

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