PRODUCT DESIGNED TO BE USED WITH HANDLING SYSTEM
A product (Pr) can be used in the semiconductor, MEM, flat screen and/or solar cell industries, where the product is capable of being gripped by a handling system (Bm). The product can include: a plate (1) made of silicon, quartz, silicon carbide, silicon nitride, arsenic, and/or gallium arsenide, c...
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Main Authors | , , |
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Format | Patent |
Language | English French |
Published |
02.05.2008
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Subjects | |
Online Access | Get full text |
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