EDGE TERMINATION FOR SEMICONDUCTOR DEVICE

• Main Authors: VAN DALEN, ROB, SWANENBERG, MAARTEN, J
• Format: Patent
• Language: English; French
• Published: 30.11.2006
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A semiconductor device has active region (30) and edge termination region (32) which includes a plurality of floating field regions (46). Field plates (54) extend in the edge termination region (32) inwards from contact holes (56) towards the active region (30) over a plurality of floating field reg...