FLUORINE-CONTAINING COMPOUND, FLUORINE-CONTAINING POLYMER, RESIST COMPOSITION AND RESIST PROTECTIVE FILM COMPOSITION
Disclosed is a fluorine-containing polymer which has a functional group and is highly transparent to a wide wavelength range. Also disclosed are a resist composition composed of such a fluorine-containing polymer and a resist protective film composition. Specifically disclosed is a fluorine-containi...
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Language | English French Japanese |
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02.02.2006
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Abstract | Disclosed is a fluorine-containing polymer which has a functional group and is highly transparent to a wide wavelength range. Also disclosed are a resist composition composed of such a fluorine-containing polymer and a resist protective film composition. Specifically disclosed is a fluorine-containing polymer having a monomer unit obtained by ring-forming polymerization of a fluorine-containing diene and represented by the following formula (1): CF2=CFCF2C(CF3)(OR1)-(CH2)nCR2=CHR3. [In the formula (1), R1 represents a hydrogen atom, an alkyl group having 20 or less carbon atoms or (CH2)aCOOR4 (wherein a is 0 or 1, and R4 represents a hydrogen atom or an alkyl group having 20 or less carbon atoms), R2 and R3 independently represent a hydrogen atom or an alkyl group having 12 or less carbon atoms, and n represents 0 or 2. When n is 0, at least one of R1, R2 and R3 is other than a hydrogen atom.]
Polymère contenant du fluor ayant un groupe fonctionnel et étant hautement transparent pour un large éventail de longueurs d'ondes. Cette invention concerne également une composition de réserve composée de ce polymère contenant du fluor, ainsi qu'une composition de film protecteur de réserve. Plus spécifiquement, cette invention concerne un polymère contenant du fluor, ayant une unité monomère obtenue par polymérisation avec cyclisation d'un diène contenant du fluor, et est représentée par la formule suivante (1) : CF2=CFCF2C(CF3)(OR1)-(CH2)nCR2=CHR3. [Dans la formule (1), R1 représente un atome hydrogène, un groupe alkyl ayant au plus 20 atomes de carbone ou (CH2)aCOOR4 (où a est égal à 0 ou à 1, R4 représente un atome hydrogène ou un groupe alkyl ayant au plus 20 atomes de carbone), R2 et R3 représentent indépendamment un atome hydrogène ou un groupe alkyl ayant au plus 12 atomes de carbone, et n est égal à 0 ou à 2. Quand n est égal à 0, au moins un élément parmi R1, R2 et R3 n'est pas un atome hydrogène.] |
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AbstractList | Disclosed is a fluorine-containing polymer which has a functional group and is highly transparent to a wide wavelength range. Also disclosed are a resist composition composed of such a fluorine-containing polymer and a resist protective film composition. Specifically disclosed is a fluorine-containing polymer having a monomer unit obtained by ring-forming polymerization of a fluorine-containing diene and represented by the following formula (1): CF2=CFCF2C(CF3)(OR1)-(CH2)nCR2=CHR3. [In the formula (1), R1 represents a hydrogen atom, an alkyl group having 20 or less carbon atoms or (CH2)aCOOR4 (wherein a is 0 or 1, and R4 represents a hydrogen atom or an alkyl group having 20 or less carbon atoms), R2 and R3 independently represent a hydrogen atom or an alkyl group having 12 or less carbon atoms, and n represents 0 or 2. When n is 0, at least one of R1, R2 and R3 is other than a hydrogen atom.]
Polymère contenant du fluor ayant un groupe fonctionnel et étant hautement transparent pour un large éventail de longueurs d'ondes. Cette invention concerne également une composition de réserve composée de ce polymère contenant du fluor, ainsi qu'une composition de film protecteur de réserve. Plus spécifiquement, cette invention concerne un polymère contenant du fluor, ayant une unité monomère obtenue par polymérisation avec cyclisation d'un diène contenant du fluor, et est représentée par la formule suivante (1) : CF2=CFCF2C(CF3)(OR1)-(CH2)nCR2=CHR3. [Dans la formule (1), R1 représente un atome hydrogène, un groupe alkyl ayant au plus 20 atomes de carbone ou (CH2)aCOOR4 (où a est égal à 0 ou à 1, R4 représente un atome hydrogène ou un groupe alkyl ayant au plus 20 atomes de carbone), R2 et R3 représentent indépendamment un atome hydrogène ou un groupe alkyl ayant au plus 12 atomes de carbone, et n est égal à 0 ou à 2. Quand n est égal à 0, au moins un élément parmi R1, R2 et R3 n'est pas un atome hydrogène.] |
Author | TAKEBE, YOKO EDA, MASATAKA YOKOKOJI, OSAMU SASAKI, TAKASHI |
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DocumentTitleAlternate | COMPOSÉ CONTENANT DU FLUOR, POLYMÈRE CONTENANT DU FLUOR, COMPOSITION DE RÉSERVE ET COMPOSITION DE FILM PROTECTEUR DE RÉSERVE |
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RelatedCompanies | TAKEBE, YOKO EDA, MASATAKA YOKOKOJI, OSAMU SASAKI, TAKASHI ASAHI GLASS COMPANY, LIMITED |
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Snippet | Disclosed is a fluorine-containing polymer which has a functional group and is highly transparent to a wide wavelength range. Also disclosed are a resist... |
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Title | FLUORINE-CONTAINING COMPOUND, FLUORINE-CONTAINING POLYMER, RESIST COMPOSITION AND RESIST PROTECTIVE FILM COMPOSITION |
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