APPARATUS AND PROCESS FOR SENSING TARGET GAS SPECIES IN SEMICONDUCTOR PROCESSING SYSTEMS
A gas detector and process for detecting a target gas species, such as a fluorine-containing species in a gas containing same, e.g., an effluent of a semiconductor processing tool undergoing etch cleaning with HF, NF3, etc. The gas detector in one aspect employs a nickel-containing filament that is...
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Main Authors | , , , , , |
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Format | Patent |
Language | English French |
Published |
29.12.2005
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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