APPARATUS AND PROCESS FOR SENSING TARGET GAS SPECIES IN SEMICONDUCTOR PROCESSING SYSTEMS

• Main Authors: CHEN, ING-SHIN, NEUNER, JEFFREY, W, CHEN, PHILIP, S., H, WELCH, JAMES, ROEDER, JEFFREY, F, DIMEO, FRANK, JR
• Format: Patent
• Language: English; French
• Published: 29.12.2005
• Edition: 7
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

A gas detector and process for detecting a target gas species, such as a fluorine-containing species in a gas containing same, e.g., an effluent of a semiconductor processing tool undergoing etch cleaning with HF, NF3, etc. The gas detector in one aspect employs a nickel-containing filament that is...