BOTTOM ANTIREFLECTIVE COATINGS
The present invention relates to bottom antireflective coating compositions and polymers useful in making such compositions. Compositions pour couches de fond antiréfléchissantes et polymères utiles pour produire ces compositions.
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| Main Authors | , , , |
|---|---|
| Format | Patent |
| Language | English French |
| Published |
23.03.2006
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| Edition | 7 |
| Subjects | |
| Online Access | Get full text |
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| Abstract | The present invention relates to bottom antireflective coating compositions and polymers useful in making such compositions.
Compositions pour couches de fond antiréfléchissantes et polymères utiles pour produire ces compositions. |
|---|---|
| AbstractList | The present invention relates to bottom antireflective coating compositions and polymers useful in making such compositions.
Compositions pour couches de fond antiréfléchissantes et polymères utiles pour produire ces compositions. |
| Author | WU, HENGPENG DING-LEE, SHUJI XIANG, ZHONG YAO, HUIRONG |
| Author_xml | – fullname: YAO, HUIRONG – fullname: DING-LEE, SHUJI – fullname: XIANG, ZHONG – fullname: WU, HENGPENG |
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| Discipline | Medicine Chemistry Sciences Physics |
| DocumentTitleAlternate | COUCHES DE FOND ANTIRÉFLÉCHISSANTES |
| Edition | 7 |
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| Notes | Application Number: WO2004IB04412 |
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| PublicationDateYYYYMMDD | 2006-03-23 |
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| RelatedCompanies | AZ ELECTRONIC MATERIALS USA CORP |
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| Snippet | The present invention relates to bottom antireflective coating compositions and polymers useful in making such compositions.
Compositions pour couches de fond... |
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| SubjectTerms | ACYCLIC OR CARBOCYCLIC COMPOUNDS ADHESIVES APPARATUS SPECIALLY ADAPTED THEREFOR CHEMICAL PAINT OR INK REMOVERS CHEMISTRY CINEMATOGRAPHY COATING COMPOSITIONS, e.g. PAINTS, VARNISHES ORLACQUERS COMPOSITIONS BASED THEREON CORRECTING FLUIDS DYES ELECTROGRAPHY FILLING PASTES HETEROCYCLIC COMPOUNDS HOLOGRAPHY INKS MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS MATERIALS THEREFOR METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS ORGANIC CHEMISTRY ORGANIC MACROMOLECULAR COMPOUNDS ORIGINALS THEREFOR PAINTS PASTES OR SOLIDS FOR COLOURING OR PRINTING PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS POLISHES THEIR PREPARATION OR CHEMICAL WORKING-UP USE OF MATERIALS THEREFOR WOODSTAINS |
| Title | BOTTOM ANTIREFLECTIVE COATINGS |
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