VOLUME MEASUREMENT APPARATUS AND METHOD
Embodiments of the invention generally provide an electrochemical processing system configured to provide selected amounts of electrolyte composition components for plating processes. The selected amounts of components to be added to an electrolyte composition may be achieved by a volume measurement...
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| Main Authors | , , |
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| Format | Patent |
| Language | English French |
| Published |
12.05.2005
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| Edition | 7 |
| Subjects | |
| Online Access | Get full text |
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| Abstract | Embodiments of the invention generally provide an electrochemical processing system configured to provide selected amounts of electrolyte composition components for plating processes. The selected amounts of components to be added to an electrolyte composition may be achieved by a volume measurement device (312) using an ultrasonic sensor (620) to measure volume levels of components in a vessel.
Des modes de réalisation de cette invention concernent d'une manière générale un système de traitement électrochimique conçu pour fournir des quantités définies de composants de compositions électrolytiques utilisés dans des processus de métallisation. Les quantités définies de composants à ajouter à une composition électrolytique peuvent être obtenues à l'aide d'un dispositif de mesure de volume (312) qui utilise un capteur ultrasonique (620) pour mesurer les niveaux de volumes de composants dans un récipient. |
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| AbstractList | Embodiments of the invention generally provide an electrochemical processing system configured to provide selected amounts of electrolyte composition components for plating processes. The selected amounts of components to be added to an electrolyte composition may be achieved by a volume measurement device (312) using an ultrasonic sensor (620) to measure volume levels of components in a vessel.
Des modes de réalisation de cette invention concernent d'une manière générale un système de traitement électrochimique conçu pour fournir des quantités définies de composants de compositions électrolytiques utilisés dans des processus de métallisation. Les quantités définies de composants à ajouter à une composition électrolytique peuvent être obtenues à l'aide d'un dispositif de mesure de volume (312) qui utilise un capteur ultrasonique (620) pour mesurer les niveaux de volumes de composants dans un récipient. |
| Author | RABINOVICH, YEVGENIY CAMERON, DONALD, A BALISKY, TODD, A |
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| DocumentTitleAlternate | APPAREIL ET PROCEDE DE MESURE DE VOLUME |
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| Notes | Application Number: WO2004US33483 |
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| RelatedCompanies | RABINOVICH, YEVGENIY CAMERON, DONALD, A BALISKY, TODD, A APPLIED MATERIALS, INC |
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| Snippet | Embodiments of the invention generally provide an electrochemical processing system configured to provide selected amounts of electrolyte composition... |
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| SubjectTerms | APPARATUS THEREFOR CHEMISTRY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES METALLURGY PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS |
| Title | VOLUME MEASUREMENT APPARATUS AND METHOD |
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