APPARATUS FOR PLANARIZING A PROBE CARD AND METHOD USING SAME

An apparatus (69) for use with a wafer prober (15) and a probe card (34) comprising a stiffening member (60) having a feature (68) defining a first plane. The stiffening member is mountable atop the central portion (56) of the probe card. A reference member (42) is provided to mount to the wafer pro...

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Bibliographic Details
Main Authors WAKEFIELD, RAY, FOSTER, CRAIG, Z
Format Patent
LanguageEnglish
French
Published 29.12.2005
Edition7
Subjects
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