APPARATUS FOR PLANARIZING A PROBE CARD AND METHOD USING SAME

• Main Authors: WAKEFIELD, RAY, FOSTER, CRAIG, Z
• Format: Patent
• Language: English; French
• Published: 10.02.2005
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

An apparatus (69) for use with a wafer prober (15) and a probe card (34) comprising a stiffening member (60) having a feature (68) defining a first plane. The stiffening member is mountable atop the central portion (56) of the probe card. A reference member (42) is provided to mount to the wafer pro...