PLASMA SYNTHESIS OF METAL OXIDE NANOPOWDER AND APPARATUS THEREFOR

• Main Authors: BOULOS, MAHER, I, NESSIM, CHRISTINE, A., ABDEL, MESSIH, JUREWICZ, JERZY, W
• Format: Patent
• Language: English; French
• Published: 18.11.2004
• Edition: 7
• Subjects: ADHESIVES; CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY; CHEMISTRY; COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F; COMPOUNDS THEREOF; DYES; FERROUS OR NON-FERROUS ALLOYS; INORGANIC CHEMISTRY; METALLURGY; MISCELLANEOUS APPLICATIONS OF MATERIALS; MISCELLANEOUS COMPOSITIONS; NATURAL RESINS; NON-METALLIC ELEMENTS; PAINTS; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; POLISHES; PREPARATION OF CARBON BLACK; PRETREATMENT OF RAW MATERIALS; PRODUCTION AND REFINING OF METALS; THEIR RELEVANT APPARATUS; TRANSPORTING; TREATMENT OF ALLOYS OR NON-FERROUS METALS; TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS,TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES

A process and apparatus for the synthesis of metal oxide nanopowder from a metal compound vapour is presented. In particular a process and apparatus for the synthesis of Ti02 nanopowder from TiCl4 is disclosed. The metal compound vapour is reacted with an oxidizing gas in electrically induced RF fre...