EVALUATING METHOD AND METHOD FOR MANUFACTURING EXPOSURE APPARATUS
A pattern formation member where a predetermined pattern is formed is placed on a first surface, a photosensitive body having a physical property concerning color such as the color density variable with the amount of energy of an energy beam applied is placed on a second surface, and the pattern is...
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Main Authors | , |
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Format | Patent |
Language | English French Japanese |
Published |
05.06.2003
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Abstract | A pattern formation member where a predetermined pattern is formed is placed on a first surface, a photosensitive body having a physical property concerning color such as the color density variable with the amount of energy of an energy beam applied is placed on a second surface, and the pattern is transferred to the photosensitive body through a projection optical system by applying an energy beam to the pattern formation member (step 413). The image of the pattern is detected according to the change of the physical property of the photosensitive body, such as the presence/absence of color, and the state of formation of the image of the pattern is extracted according to the results of the detection (step 423). A characteristic of an exposure apparatus is evaluated from the state of formation of the image (step 429).
Dans cette invention, un élément de formation de motifs, dans lequel on forme un motif prédéterminé, est placé sur une première surface, un corps photosensible ayant une propriété physique concernant la couleur, telle que la densité de couleur variable avec la quantité d'énergie d'un faisceau d'énergie appliqué, est placé sur une seconde surface, et le motif est transféré au corps photosensible par l'intermédiaire d'un système optique de projection qui applique un faisceau d'énergie sur l'élément de formation d'image (étape 413). L'image du motif est détectée en fonction de la variation de la propriété physique du corps photosensible, par exemple la présence/l'absence de couleur, et l'état de formation de l'image du motif est extrait en fonction des résultats de cette détection (étape 423). Une caractéristique d'un appareil d'exposition est évaluées à partir de l'état de formation de l'image (étape 429). |
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AbstractList | A pattern formation member where a predetermined pattern is formed is placed on a first surface, a photosensitive body having a physical property concerning color such as the color density variable with the amount of energy of an energy beam applied is placed on a second surface, and the pattern is transferred to the photosensitive body through a projection optical system by applying an energy beam to the pattern formation member (step 413). The image of the pattern is detected according to the change of the physical property of the photosensitive body, such as the presence/absence of color, and the state of formation of the image of the pattern is extracted according to the results of the detection (step 423). A characteristic of an exposure apparatus is evaluated from the state of formation of the image (step 429).
Dans cette invention, un élément de formation de motifs, dans lequel on forme un motif prédéterminé, est placé sur une première surface, un corps photosensible ayant une propriété physique concernant la couleur, telle que la densité de couleur variable avec la quantité d'énergie d'un faisceau d'énergie appliqué, est placé sur une seconde surface, et le motif est transféré au corps photosensible par l'intermédiaire d'un système optique de projection qui applique un faisceau d'énergie sur l'élément de formation d'image (étape 413). L'image du motif est détectée en fonction de la variation de la propriété physique du corps photosensible, par exemple la présence/l'absence de couleur, et l'état de formation de l'image du motif est extrait en fonction des résultats de cette détection (étape 423). Une caractéristique d'un appareil d'exposition est évaluées à partir de l'état de formation de l'image (étape 429). |
Author | TAKEDA, KANAME HAYASHI, TSUNEHITO |
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DocumentTitleAlternate | PROCEDE D'EVALUATION ET PROCEDE POUR LA FABRICATION D'UN APPAREIL D'EXPOSITION |
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RelatedCompanies | NIKON CORPORATION TAKEDA, KANAME HAYASHI, TSUNEHITO |
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SubjectTerms | APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS |
Title | EVALUATING METHOD AND METHOD FOR MANUFACTURING EXPOSURE APPARATUS |
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