ABRASIVE, ABRASIVE SLURRY, AND METHOD FOR MANUFACTURING ABRASIVE

• Main Authors: ITO, KATSURA, SAEGUSA, HIROSHI, MASUDA, TOMOYUKI, IMAI, FUMIO
• Format: Patent
• Language: English; French; Japanese
• Published: 20.06.2002
• Edition: 7
• Subjects: ADHESIVES; CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS; CHEMISTRY; DRESSING OR CONDITIONING OF ABRADING SURFACES; DYES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GLASS; GRINDING; INFORMATION STORAGE; INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER; JOINING GLASS TO GLASS OR OTHER MATERIALS; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE; METALLURGY; MINERAL OR SLAG WOOL; MISCELLANEOUS APPLICATIONS OF MATERIALS; MISCELLANEOUS COMPOSITIONS; NATURAL RESINS; PAINTS; PERFORMING OPERATIONS; PHYSICS; POLISHES; POLISHING; POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH; SKI WAXES; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS; SURFACE TREATMENT OF GLASS; TRANSPORTING

An abrasive used for precisely grinding a substrate used in the optics and electronics industries such as a glass substrate of an optical lens, optical disc, magnetic disc, plasma display, liquid crystal, or LSI photomask. The abrasive is composed of abrasive particles such that the ratio D95/D50 of...