Three dimensional semiconductor devices

• Main Authors: Chang, Sung-Il, Lim, Jin-Soo, Son, Byoungkeun, Lee, Changhyun
• Format: Patent
• Language: English
• Published: 20.08.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Three-dimensional semiconductor devices are provided. The three-dimensional semiconductor device includes a substrate, a buffer layer on the substrate. The buffer layer includes a material having an etching selectivity relative to that of the substrate. A multi-layer stack including alternating insu...