Method and apparatus for backside cleaning of substrates

• Main Authors: Thirunavukarasu, Sriskantharajah, Lew, Jen Sern, Nemani, Srinivas D, Sundarrajan, Arvind
• Format: Patent
• Language: English
• Published: 12.06.2018
• Subjects: BASIC ELECTRIC ELEMENTS; CLEANING; CLEANING IN GENERAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PERFORMING OPERATIONS; PREVENTION OF FOULING IN GENERAL; SEMICONDUCTOR DEVICES; TRANSPORTING

Embodiments of methods and apparatus for removing particles from a surface of a substrate, such as from the backside of the substrate, are provided herein. In some embodiments, an apparatus for removing particles from a surface of a substrate includes: a substrate handler to expose the surface of th...