Multilevel pressure sensor

• Main Authors: Wosnitza, Elmar, Textor, Olaf, Rossberg, Andreas
• Format: Patent
• Language: English
• Published: 05.06.2018
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

A pressure sensor comprises a deformable measuring diaphragm, and a mating body connected in a pressure-tight manner and forms a measuring chamber in which a reference pressure is present. A pressure can be applied to an outside of the measuring diaphragm. The pressure sensor has a capacitive transd...