Transistor structures gated using a conductor-filled via or trench

Device structures involving a conductor-filled via or trench, methods of forming such device structures, and methods of operating such device structures. A doped region is formed in the substrate. An opening, such as a via or trench, is formed that extends through the doped region and into a portion...

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Bibliographic Details
Main Authors Cranmer, Michael S, Safran, John M, Rosenblatt, Sami, Kothandaraman, Chandrasekharan
Format Patent
LanguageEnglish
Published 24.04.2018
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Summary:Device structures involving a conductor-filled via or trench, methods of forming such device structures, and methods of operating such device structures. A doped region is formed in the substrate. An opening, such as a via or trench, is formed that extends through the doped region and into a portion of the substrate beneath the doped region. A conductive plug in formed in the opening to provide the conductor-filled via or trench. The opening is positioned and dimensioned relative to a position and dimensions of the doped region to divide the doped region into a first section and a second section that is disconnected from the first section by the opening.
Bibliography:Application Number: US201615083914