Wavy micro gas chromatography column

A wavy micro gas chromatography column includes a silicon substrate and a bonded glass cover. A micro channel having a rectangular cross section is etched on the silicon substrate and coated with a stationary phase film. A projection figure of the micro channel on the silicon substrate includes mult...

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Bibliographic Details
Main Authors Wu Penglin, Jiang Yadong, Du Xiaosong, Yuan Huan, Zhao Xulan
Format Patent
LanguageEnglish
Published 20.03.2018
Subjects
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