Wavy micro gas chromatography column
A wavy micro gas chromatography column includes a silicon substrate and a bonded glass cover. A micro channel having a rectangular cross section is etched on the silicon substrate and coated with a stationary phase film. A projection figure of the micro channel on the silicon substrate includes mult...
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Main Authors | , , , , |
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Format | Patent |
Language | English |
Published |
20.03.2018
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Subjects | |
Online Access | Get full text |
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