Wavy micro gas chromatography column

A wavy micro gas chromatography column includes a silicon substrate and a bonded glass cover. A micro channel having a rectangular cross section is etched on the silicon substrate and coated with a stationary phase film. A projection figure of the micro channel on the silicon substrate includes mult...

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Bibliographic Details
Main Authors Wu Penglin, Jiang Yadong, Du Xiaosong, Yuan Huan, Zhao Xulan
Format Patent
LanguageEnglish
Published 20.03.2018
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:A wavy micro gas chromatography column includes a silicon substrate and a bonded glass cover. A micro channel having a rectangular cross section is etched on the silicon substrate and coated with a stationary phase film. A projection figure of the micro channel on the silicon substrate includes multiple regular wavy curves. Each wavy curve is formed through alternately connecting first upper arcs with first lower arcs. Because the groove has a curving structure, the carrier gas velocity is decreased as the increase of the arc angle, resulting in an improvement of the flow uniformity at the zones between two adjacent bends but also an enlarging nonsymmetric distribution at the bends. Thus, an optimal curving structure can make the overall flow more even, and in turn achieve a better separation performance compared to the straight channel columns. Meanwhile, a wavy channel realizes a longer column length on a given area.
Bibliography:Application Number: US201615164841