Method and system for defect classification

• Main Authors: He Li, Venkataraman Sankar, Chen Chien-Huei Adam, Jordan, III John R, Ying Huajun, Sinha Harsh
• Format: Patent
• Language: English
• Published: 20.02.2018
• Subjects: CALCULATING; COMPUTING; COUNTING; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

Defect classification includes acquiring one or more images of a specimen, receiving a manual classification of one or more training defects based on one or more attributes of the one or more training defects, generating an ensemble learning classifier based on the received manual classification and...