Apparatus for depositing a thin layer of polymer resist on a substrate
The present inventions relate to the formation of a thin polymer film on a substrate. Apparatus is described for transforming a solid polymer resist into an aerosol of small particles, electrostatically charging and depositing the particles onto a substrate, and flowing the particles into a continuo...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
14.11.2017
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Subjects | |
Online Access | Get full text |
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