Method of manufacturing chemical mechanical polishing pads
A method of manufacturing chemical mechanical polishing pads is provided, wherein an automated inspection system is configured to detect macro inhomogeneities is skived sheets and to classify the skived sheets as either acceptable or suspect; wherein the acceptable skived sheets are further processe...
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Main Authors | , , , , , , , , |
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Format | Patent |
Language | English |
Published |
26.09.2017
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Subjects | |
Online Access | Get full text |
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Abstract | A method of manufacturing chemical mechanical polishing pads is provided, wherein an automated inspection system is configured to detect macro inhomogeneities is skived sheets and to classify the skived sheets as either acceptable or suspect; wherein the acceptable skived sheets are further processed to form polishing layers of chemical mechanical polishing pads. |
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AbstractList | A method of manufacturing chemical mechanical polishing pads is provided, wherein an automated inspection system is configured to detect macro inhomogeneities is skived sheets and to classify the skived sheets as either acceptable or suspect; wherein the acceptable skived sheets are further processed to form polishing layers of chemical mechanical polishing pads. |
Author | Tate James David Chiang Leo H Gazze Mark Wank Andrew Chang Scott Acholla Francis V Heeschen William A Tsai Jeff Chin Swee-Teng |
Author_xml | – fullname: Chiang Leo H – fullname: Gazze Mark – fullname: Heeschen William A – fullname: Wank Andrew – fullname: Chang Scott – fullname: Acholla Francis V – fullname: Tsai Jeff – fullname: Chin Swee-Teng – fullname: Tate James David |
BookMark | eNrjYmDJy89L5WSw8k0tychPUchPU8hNzCtNS0wuKS3KzEtXSM5Izc1MTsxRyE1NzkjMAzML8nMyizNAsgWJKcU8DKxpiTnFqbxQmptBwc01xNlDN7UgPz61uCAxOTUvtSQ-NNjS3NzAwsDCyciYCCUAPVQw2Q |
ContentType | Patent |
DBID | EVB |
DatabaseName | esp@cenet |
DatabaseTitleList | |
Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Medicine Chemistry Sciences Physics |
ExternalDocumentID | US9770808B2 |
GroupedDBID | EVB |
ID | FETCH-epo_espacenet_US9770808B23 |
IEDL.DBID | EVB |
IngestDate | Fri Jul 19 17:10:49 EDT 2024 |
IsOpenAccess | true |
IsPeerReviewed | false |
IsScholarly | false |
Language | English |
LinkModel | DirectLink |
MergedId | FETCHMERGED-epo_espacenet_US9770808B23 |
Notes | Application Number: US201614993815 |
OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20170926&DB=EPODOC&CC=US&NR=9770808B2 |
ParticipantIDs | epo_espacenet_US9770808B2 |
PublicationCentury | 2000 |
PublicationDate | 20170926 |
PublicationDateYYYYMMDD | 2017-09-26 |
PublicationDate_xml | – month: 09 year: 2017 text: 20170926 day: 26 |
PublicationDecade | 2010 |
PublicationYear | 2017 |
RelatedCompanies | Rohm and Haas Electronic Materials CMP Holdings, Inc Dow Global Technologies LLC |
RelatedCompanies_xml | – name: Rohm and Haas Electronic Materials CMP Holdings, Inc – name: Dow Global Technologies LLC |
Score | 3.1071944 |
Snippet | A method of manufacturing chemical mechanical polishing pads is provided, wherein an automated inspection system is configured to detect macro inhomogeneities... |
SourceID | epo |
SourceType | Open Access Repository |
SubjectTerms | AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING CUTTING DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING,CUTTING-OUT, STAMPING-OUT OR SEVERING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING HAND CUTTING TOOLS INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULARARTICLES INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING MEASURING PERFORMING OPERATIONS PHYSICS POLISHING SEVERING SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS TESTING TOOLS FOR GRINDING, BUFFING, OR SHARPENING TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL |
Title | Method of manufacturing chemical mechanical polishing pads |
URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20170926&DB=EPODOC&locale=&CC=US&NR=9770808B2 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1bS8MwFD6MeX3Tqjhv5EH6VnRdlrVCEXpjCN2GW2Vvo2kb2MPaYjv8-56EbvqibyGBQxL4ziU53zkAjwnPTG5RaqBLlBs0FQgp9MONzKZSZWL8o5Ixowkbx_RtOVx2YL3jwqg6oV-qOCIiKkW8N0pfVz-PWL7Krayf-Bqnytdw4fh6Gx33R8-2yXTfdYLZ1J96uuc58VyfvGOwNELfyHJRWx9IL1qW2Q8-XElKqX5blPAMDmcorGjOoZMXGpx4u8ZrGhxH7X-3BkcqQTOtcbIFYX0BL5Hq-kxKQTZJsZXUBMU1JGlL_iebXPJ51VA2YVCvTKRKsvoSSBgsvLGB21ntj76K5_uND66gW5RFfg3EshmXFaaFMAUdJsKy0wFLbItmjPdNwXvQ-1PMzT9rt3Aq71CmQ5jsDrrN5za_R5vb8Ad1W98fQoZQ |
link.rule.ids | 230,309,786,891,25594,76906 |
linkProvider | European Patent Office |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LS8NAEB5KfdSbRsX63IPkFrTpNg8hCEkaojZtsa30VrJJFnpoGkyKf9_ZJa1e9LbswrC78M1jd74ZgPuYpTqzKNXQJco0mnCEFPrhWmpToTIx_pHJmNHQCGf0dd6bN2C55cLIOqFfsjgiIipBvFdSXxc_j1i-zK0sH9gSp9bPwdTx1To67piPtm6ovuv0xyN_5Kme58wm6vAdgyUTfSPLRW29Z4rivMJz-nAFKaX4bVGCY9gfo7C8OoFGlivQ8raN1xQ4jOr_bgUOZIJmUuJkDcLyFJ4i2fWZrDlZxflGUBMk15AkNfmfrDLB55VD0YRBvjKRIk7LMyBBf-qFGm5nsTv6YjbZbbx7Ds18nWcXQCzbYKLCNOc6p72YW3bSNWLboqnBOjpnbWj_Kebyn7U7aIXTaLAYvAzfruBI3KdIjdCNa2hWn5vsBu1vxW7lzX0Dj3eJPQ |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Method+of+manufacturing+chemical+mechanical+polishing+pads&rft.inventor=Chiang+Leo+H&rft.inventor=Gazze+Mark&rft.inventor=Heeschen+William+A&rft.inventor=Wank+Andrew&rft.inventor=Chang+Scott&rft.inventor=Acholla+Francis+V&rft.inventor=Tsai+Jeff&rft.inventor=Chin+Swee-Teng&rft.inventor=Tate+James+David&rft.date=2017-09-26&rft.externalDBID=B2&rft.externalDocID=US9770808B2 |