Lamella creation method and device using fixed-angle beam and rotating sample stage

• Main Authors: Utlaut Mark W, Wells Andrew B, Parker N. William, Chandler Clive D
• Format: Patent
• Language: English
• Published: 15.08.2017
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

A system for creating a substantially planar face in a substrate, the system including directing one or more beams at a first surface of a substrate to remove material from a first location, the beam being offset from a normal to the first surface by a curtaining angle; sweeping the one or more beam...