Manufacturing method of a condenser microphone

A condenser microphone comprises a substrate, a vibratile diaphragm and a back plate. The substrate has an opening. The diaphragm is disposed corresponding to the substrate and covers the opening, and has a plurality of protrusions. The back plate is coupled to the diaphragm and has a plurality of t...

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Bibliographic Details
Main Authors Chiu Kuan-Hsun, Chen Jen-Yi, Chen Sun-Zen, Chen Henry J. H, Hsieh Kuang-Chien
Format Patent
LanguageEnglish
Published 08.08.2017
Subjects
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