Substrate support structure, vacuum drying apparatus and method for vacuum drying a substrate

• Main Authors: Yuan Min, Zhang Hequn, Yang Longgen, Xing Hongwei, Mu Huihui
• Format: Patent
• Language: English
• Published: 01.08.2017
• Subjects: BLASTING; DRYING; DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM; HEATING; LIGHTING; MECHANICAL ENGINEERING; WEAPONS

Disclosed is a substrate support structure, a vacuum drying apparatus and a method for vacuum drying a substrate. The substrate support structure comprises: a support pin having a top end for supporting a substrate; and an auxiliary support assembly including: a drive device; a support rod driven by...