Method of manufacturing thin film transistor (TFT) array substrate

• Main Authors: Jung Kwan-Wook, Oh Jae-Hwan, Choi Jong-Hyun, Choi Jae-Beom, Jin Seong-Hyun, Lee June-Woo, Kim Kwang-Hae
• Format: Patent
• Language: English
• Published: 17.01.2017
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A thin film transistor (TFT) array substrate is provided that includes a TFT on a substrate. The TFT can include an active layer, gate electrode, source electrode, drain electrode, first insulating layer between the active layer and the gate electrode, and second insulating layer between the gate el...