Normally closed microelectromechanical switches (MEMS), methods of manufacture and design structures
Normally closed (shut) micro-electro-mechanical switches (MEMS), methods of manufacture and design structures are provided. A structure includes a beam structure that includes a first end hinged on a first electrode and in electrical contact with a second electrode, in its natural state when not act...
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| Main Authors | , , |
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| Format | Patent |
| Language | English |
| Published |
17.05.2016
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| Subjects | |
| Online Access | Get full text |
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| Abstract | Normally closed (shut) micro-electro-mechanical switches (MEMS), methods of manufacture and design structures are provided. A structure includes a beam structure that includes a first end hinged on a first electrode and in electrical contact with a second electrode, in its natural state when not actuated. |
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| AbstractList | Normally closed (shut) micro-electro-mechanical switches (MEMS), methods of manufacture and design structures are provided. A structure includes a beam structure that includes a first end hinged on a first electrode and in electrical contact with a second electrode, in its natural state when not actuated. |
| Author | HALL DAWN D STAMPER ANTHONY K LAMOREY MARK C. H |
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| Notes | Application Number: US201314081017 |
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| RelatedCompanies | INTERNATIONAL BUSINESS MACHINES CORPORATION |
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| Snippet | Normally closed (shut) micro-electro-mechanical switches (MEMS), methods of manufacture and design structures are provided. A structure includes a beam... |
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| SubjectTerms | BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING ELECTRIC SWITCHES ELECTRICITY EMERGENCY PROTECTIVE DEVICES GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS RELAYS SELECTORS TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TRANSPORTING |
| Title | Normally closed microelectromechanical switches (MEMS), methods of manufacture and design structures |
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