Sensor element, method of making the same, and sensor device including the same

• Main Authors: PALAZZOTTO MICHAEL C, LEE TZUN, GRYSKA STEFAN H
• Format: Patent
• Language: English
• Published: 17.05.2016
• Subjects: GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MEASURING; NANOTECHNOLOGY; PERFORMING OPERATIONS; PHYSICS; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TESTING; TRANSPORTING

A sensor element (100) includes a first conductive electrode (120) having a first conductive member (122) electrically coupled thereto; an absorptive dielectric layer (130) comprising a polymer of intrinsic microporosity; and a second conductive electrode (140) having a second conductive member (142) electrically coupled thereto. The second conductive electrode comprises carbon nanotubes and is permeable to at least one organic vapor. The absorptive dielectric layer is at least partially disposed between the first conductive electrode and the second conductive electrode. A method of making the sensor element, and sensor device (200) containing it, are also disclosed.